Development of Flexible RuO2 Film by Excimer Laser Metal Organic Deposition (ELAMOD)

Autor:	Tetsuo Tsuchiya, Yuko Uzawa, Muneyasu Suzuki, Iwao Yamaguchi, Tomohiko Nakajima, Junichi Nomoto
Rok vydání:	2019
Předmět:	Materials science Excimer laser business.industry medicine.medical_treatment Metal organic deposition medicine Optoelectronics Electrical and Electronic Engineering business
Zdroj:	IEEJ Transactions on Electronics, Information and Systems. 139:640-643
ISSN:	1348-8155 0385-4221
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f2c1ae9f069ae1f8ebcd891fdcf45c5a https://doi.org/10.1541/ieejeiss.139.640 Zobrazit plný text záznamu