GaAs-based tuning fork microresonators: A first step towards a GaAs-based coriolis 3-axis Micro-Vibrating Rate Gyro (GaAs 3-axis μCVG)
| Autor: | O. Le Traon, O. Ducloux, Alain Bosseboeuf, Iännis Roland, S. Masson |
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| Rok vydání: | 2011 |
| Předmět: |
Microelectromechanical systems
Engineering business.industry Metals and Alloys Rate gyro Gyroscope Condensed Matter Physics Piezoelectricity Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Gallium arsenide Surface micromachining Resonator chemistry.chemical_compound Optics chemistry law Electrical and Electronic Engineering Tuning fork business Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 172:204-211 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2011.07.006 |
| Popis: | This paper presents the design of a piezoelectric MEMS Coriolis Vibrating Gyroscope (CVG) based on a single gallium arsenide vibrating structure allowing the measurement of rotation rate along 3 orthogonal sensitive axes. Based on a theoretical and FEM study, we demonstrate that the achieved sensitivities reached for each axis is about 1.6 × 10 −16 C/(°/s). We then demonstrate the feasibility of the realization of simple MEMS structures from C-doped Gallium Arsenide (GaAs) using standard micromachining processes. Finally, we show the fabrication and characterization of GaAs-based tuning fork microresonators as a first step towards a complete 3-axis GaAs MEMS CVG. These resonators show a resonance frequency of 42 350 Hz, a quality factor of 122 000 and a frequency temperature coefficient of 24 ppm/°K, validating the high potential of GaAs as a structural material for 3-axis MEMS CVGs. |
| Databáze: | OpenAIRE |
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