Fabrication of polycrystalline diamond film resonators

Autor:	Xiaodong Wang, Weiyuan Wang, Yirong Yang, Zongxin Ren, Jianfang Xie
Rok vydání:	1998
Předmět:	Materials science Fabrication Silicon business.industry Diamond chemistry.chemical_element Chemical vapor deposition engineering.material Surface micromachining chemistry Etching (microfabrication) engineering Optoelectronics Dry etching business Layer (electronics)
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.324295
Popis:	In this paper, the fabrication process of polycrystalline diamond film micro-resonators was first reported. Silicon was used as substrate, LPCVD polysilicon films were used as diamond-growth-compatible sacrificial layer, and doped diamond films were grown and patterned by oxygen ion beam dry etching to be the resonators. The flexural beam resonator was vibrated in air under electrostatic excitation with AC voltage of 45 V.© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Databáze:	OpenAIRE
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