2D-printing Features of Metal, Semiconductor and Insulator Local Layers on Substrate

Autor: Yury A. Demidov, I. V. Sagunova, Grigory N. Pestov, Anton A. Stroganov, Alexey Belov
Rok vydání: 2020
Předmět:
Zdroj: 2020 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus).
DOI: 10.1109/eiconrus49466.2020.9039339
Popis: In this paper, a new approach to combined 2D printing of local layers of different materials on the same set up have been considered. A three-coordinate moving system has been developed, equipped with a heated table, a system for supplying precursors and gas to the printing zone, as well as a printing device with three print heads: inkjet, e-jet and aerojet. The advantages and disadvantages of these methods are discussed on the specific examples. It was shown that the methods have various resolution (e-jet – 2 μm, aerojet – 5 μm, inkjet – 7 μm). Moreover, the restrictions imposed on the printing method of higher resolution can be overcome using another method. Thus, a combination of these methods in one process will allow the formation of multilayer functional elements.
Databáze: OpenAIRE