Production of atomic nitrogen ion beams
| Autor: | Ka-Ngo Leung, S. R. Walther, W. B. Kunkel |
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| Rok vydání: | 1990 |
| Předmět: | |
| Zdroj: | Review of Scientific Instruments. 61:315-317 |
| ISSN: | 1089-7623 0034-6748 |
| DOI: | 10.1063/1.1141280 |
| Popis: | A small multicusp ion source has been used to generate beams of nitrogen ions. To achieve a high percentage of N+ ions, the source was equipped with a magnetic filter and operated with a high N2 gas density. A nearly pure atomic nitrogen ion (N+) beam (98.5% N+, 1.5% N2+), suitable for implantation purposes, was produced. The operating characteristics of this source, including species mix, are presented. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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