Monte-Carlo simulations of the point-to-point resolution in scanning Auger microscopy and x-ray microanalysis of thin overlayers
| Autor: | Nikos Glezos, Androula G. Nassiopoulos, Evangelos Valamontes |
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| Rok vydání: | 1992 |
| Předmět: |
Range (particle radiation)
Auger electron spectroscopy Chemistry business.industry Resolution (electron density) Monte Carlo method Surfaces and Interfaces General Chemistry Condensed Matter Physics Molecular physics Signal Microanalysis Standard deviation Surfaces Coatings and Films Optics Materials Chemistry Thin film business |
| Zdroj: | Surface and Interface Analysis. 19:419-422 |
| ISSN: | 1096-9918 0142-2421 |
| DOI: | 10.1002/sia.740190178 |
| Popis: | The point-to-point resolution of Auger electron spectroscopy is compared to that of x-ray microanalysis of thin unsupported films and of thin films on a bulk material. Monte-Carlo calculations are used in this respect. The incident beam is a Gaussian-distributed curve with standard deviation σo = 40 A and an energy range 10–100 keV. A Point-Spread-Function describing the radial distribution of the analysed signal is, in each case, determined from the Monte-Carlo results. From this function and by using the Rayleigh criterion, the point-to-point resolution is calculated. |
| Databáze: | OpenAIRE |
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