Surfactant Selection for AM Clean in a Single Wafer Oasis Wet System

Autor:	Jennifer Baker, Christopher Beaudry, Steven Verhaverbeke, Hitoshi Morinaga
Rok vydání:	2003
Předmět:	Materials science Pulmonary surfactant Chemical engineering Mineralogy General Materials Science Wafer Condensed Matter Physics Atomic and Molecular Physics and Optics Selection (genetic algorithm)
Zdroj:	Solid State Phenomena. 92:57-62
ISSN:	1662-9779
DOI:	10.4028/www.scientific.net/ssp.92.57
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f25f3f51a3c8897f9f901f31e8911209 https://doi.org/10.4028/www.scientific.net/ssp.92.57 Zobrazit plný text záznamu