| Autor: |
Qianwen Weng, Tong Guo, Zhuo Chen, Xiaotang Hu, Xing Fu |
| Rok vydání: |
2018 |
| Předmět: |
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| Zdroj: |
Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018). |
| DOI: |
10.1117/12.2500066 |
| Popis: |
According to the requirement for high precision surface measurement in the special conditions, a Linnik type measuring system with long working distance was built up based on white-light microscopic spectral interferometry. The influence of the transparent medium on the interferogram was minimized by the optical path compensation in the reference beam of the interferometer. Surface profile and film thickness can be obtained accurately after the optical path compensation and nonlinear phase error correction. The measuring results with and without transparent medium were compared to show the feasibility of the proposed methods, including displacement, profile and film thickness measurement. And experiments on the surface with complex profile and the film standard showed that the system still kept the nanoscale accuracy through transparent medium. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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