Novel Workflow for Improved Throughput, Turnaround Time, and Cross Section Preparation of Microelectronic Devices

Autor:	Chihiro Nomaguchi, Jamil J. Clarke, Akinari Morikawa, William Podrazky, Atsushi Muto, Takeshi Sunaoshi
Rok vydání:	2020
Předmět:	Cross section (physics) Workflow business.industry Computer science Embedded system Microelectronics business Instrumentation Throughput (business) Turnaround time
Zdroj:	Microscopy and Microanalysis. 26:2712-2713
ISSN:	1435-8115 1431-9276
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f20b5c1dab0b42c24daf1b9daf153c1d https://doi.org/10.1017/s1431927620022527 Zobrazit plný text záznamu