Mask-less, high aspect ratio, high resolution electron-beam-induced etching of diamond
| Autor: | Dergianlis, Vasilis, Geller, Martin, Oing, Dennis, Woehrl, Nicolas, Lorke, Axel |
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| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| DOI: | 10.13140/rg.2.2.33693.97763 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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