Evaluation of structural similarity quality measures for wrapped recovered phase maps in optical metrology
| Autor: | Arturo Bianchetti, Ana Laura Vadnjal, Alejandro Federico, Pablo Etchepareborda |
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| Rok vydání: | 2019 |
| Předmět: |
Computer science
Structural similarity business.industry Mechanical Engineering Phase (waves) Pattern recognition 02 engineering and technology Classification of discontinuities 021001 nanoscience & nanotechnology 01 natural sciences Measure (mathematics) Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials 010309 optics Interferometry Quality (physics) 0103 physical sciences Range (statistics) Artificial intelligence Electrical and Electronic Engineering 0210 nano-technology business Intensity (heat transfer) |
| Zdroj: | Optics and Lasers in Engineering. 116:103-110 |
| ISSN: | 0143-8166 |
| Popis: | We propose and evaluate structural similarity quality measures for wrapped recovered phase maps in the range of [0, 2π). The proposed measures adapt the mathematical description of a structural similarity index employed in intensity images by using circular statistics, which are suitable for analyzing the wrapped phase images obtained in the application of optical metrology techniques. The developed framework avoids 2D unwrapping pre-processing techniques and obtains a quality measure that properly evaluates visual distortions that occur in the proximities of phase discontinuities that do not correspond to significant phase errors. Numerical experiments based on the assessment of simulated wrapped images indicate the suitability of the proposed quality measure when a reference phase map is introduced. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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