Design, Development and Physics of Silicon Diffused Gauge

Autor: K.C. Chhabra, N.H. Godhwani, M.N. Singh
Rok vydání: 1985
Předmět:
Zdroj: IETE Technical Review. 2:214-217
ISSN: 0974-5971
0256-4602
DOI: 10.1080/02564602.1985.11437779
Popis: The advances in solid-state technology are much more rapid in the case of silicon than in other semiconductors. Silicon strain gauges using piezo-resistive effect in semiconductor are replacing metal strain gauges because of their sensitivity, linearity, low cost and low power consumption. The fundamental physical concepts and practical design considerations concerning the design of diffused silicon strain sensors are reviewed and their performance in pressure transducer is documented.
Databáze: OpenAIRE