Electrical Characterization of Advanced MIM Capacitors With ${\rm ZrO}_{2}$ Insulator for High-Density Packaging and RF Applications
| Autor: | Cedric Bermond, Thierry Lacrevaz, Mickael Gros-Jean, Alexis Farcy, T. Bertaud, Serge Blonkowski, Corentin Vallée, Bernard Flechet |
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| Rok vydání: | 2012 |
| Předmět: |
Permittivity
Materials science business.industry Electrical engineering Physics::Optics Insulator (electricity) Dielectric Capacitance Industrial and Manufacturing Engineering Cutoff frequency Microstrip Electronic Optical and Magnetic Materials law.invention Capacitor law Dissipation factor Optoelectronics Electrical and Electronic Engineering business |
| Zdroj: | IEEE Transactions on Components, Packaging and Manufacturing Technology. 2:502-509 |
| ISSN: | 2156-3985 2156-3950 |
| DOI: | 10.1109/tcpmt.2011.2182611 |
| Popis: | This paper deals with the electrical and wideband frequency characterizations of metal-insulator-metal (MIM) capacitors integrating the medium-k material ZrO2. First, the in situ material electrical properties are characterized in a frequency range from dc up to 5 GHz by using a microstrip waveguide method. The loss tangent and the permittivity are extracted with frequencies up to 5 GHz. We then investigate the evolution with frequency of the electrical parameters, such as capacitance density, quality factor, temperature coefficient of capacitance, voltage coefficient of capacitance, and cut-off frequency for MIM capacitors which incorporate ZrO2 dielectric layers with thickness from 10 to 45 nm. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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