| Autor: |
Matthew C. George, Eric Gardner, Jonathan Bergquist, Bin Wang, Hua Li, Rumyana Petrova |
| Rok vydání: |
2013 |
| Předmět: |
|
| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.2005318 |
| Popis: |
Moxtek has developed a high contrast IR polarizer on silicon suitable for long wavelength thermal IR applications using our aluminum nanowire, large area patterning capabilities. Between 7 and 15 microns, our 144 nm pitch polarizers transmit better than 70% of the passing polarization state and have a contrast ratio better than 40 dB. Transmission and reflectance measurements were made using a Fourier Transform Infrared (FTIR) spectrometer with instrument accuracy verified using silicon and germanium reference standards. Results were compared to RCWA modeling of the wire grid polarizer (WGP) performance on antireflection-coated wafers. The FTIR instrument noise floor limited the maximum contrast measurement to about 40 dB, but high polarizer contrast was verified at 10.6 μm using a CO 2 laser and pyroelectric detector. A continuous wave Gaussian beam from a CO 2 laser was used for Laser Damage Threshold (LDT) testing and showed LDT values of 110 kW/cm 2 and 10 kW/cm 2 in the blocking and passing states respectively. Analysis of laser damage threshold test samples shows the damage propagating from defects in the anti-reflection (AR) coating. Removing these AR coating defects should improve LDT performance and transmission in the thermal IR. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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