| Autor: |
J.A. Sprague, P.A. Treado, P.R. Malmberg, W.A. Fraser, Mervine Rosen, G. P. Mueller, G.W. Reynolds, J.M. Lambert |
| Rok vydání: |
1986 |
| Předmět: |
|
| Zdroj: |
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 18:360-364 |
| ISSN: |
0168-583X |
| Popis: |
The sputtering yield, joint polar and azimuthal angular distributions and the energy distribution of atoms sputtered from copper single crystals by 100 keV copper ions has been calculated as a function of crystal orientation using the cascade simulation code MARLOWE. The calculated yields and angular distributions are compared with experimental results for ions incident parallel to a close-packed axial channelling direction, parallel to a plane, and along a pseudo-random direction. Significant channeling effects are exhibited in both calculations and experiment. Strong peaking in the backscattered direction is calculated and observed for the axial irradiations alone. Primary range distributions and damage profiles are calculated for the three crystal orientations and compared with lattice damage measurements. The distributions of sputtered ions in both energy and angle are presented. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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