Complete shape measurement of micro parts by digital holography

Autor:	S. Huferath-von Luepke, Reiner Klattenhoff, Claas Falldorf, Ralf B. Bergmann, Colin Dankwart
Rok vydání:	2014
Předmět:	business.industry Computer science ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION Holography law.invention Interferometry Optics law Microscopy Digital holographic microscopy Degree (angle) Computer vision Artificial intelligence business Digital holography
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.2063389
Popis:	Industry frequently demands fast and robust measurement techniques for the inline inspection of the full shape of objects in the micro range. We present a method for complete 360 degree measurement of the shape of a micro cup using digital holographic microscopy and show first results of sequential 360 degree measurement using different illumination and observation directions.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f0af5e1c37acead8c129f9236b5f16fc https://doi.org/10.1117/12.2063389 Zobrazit plný text záznamu