Scaling electromechanical sensors down to the nanoscale
| Autor: | Christopher Dibiasio, Michael Cullinan, Robert M. Panas, Martin L. Culpepper |
|---|---|
| Rok vydání: | 2012 |
| Předmět: |
Microelectromechanical systems
Nanoelectromechanical systems Fabrication Computer science Metals and Alloys Nanotechnology Hardware_PERFORMANCEANDRELIABILITY Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Mechanical system Hardware_INTEGRATEDCIRCUITS Nanoscale Phenomena Electrical and Electronic Engineering Instrumentation Nanoscopic scale Scaling Scale down Hardware_LOGICDESIGN |
| Zdroj: | Sensors and Actuators A: Physical. 187:162-173 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2012.08.035 |
| Popis: | Traditional MEMS sensing systems do not scale down well to the nanoscale due to resolution and fabrication limitations. Therefore, new sensing systems need to be developed in order to meet the range and resolution requirements of nanoscale mechanical systems. Several nanoscale mechanical sensing systems have emerged that take advantage of nanoscale phenomena to improve the quality of nanoscale sensors. In this paper, we will discuss some of the fundamental limitations in scaling mechanical sensors down to the nanoscale and some of the emerging technologies for nanoscale sensing. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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