Critical enabling properties of CaF 2 lens blanks for state-of-the-art lithography tools

Autor: Lutz Dr. Parthier, Joerg Hahn, Guenter Grabosch, Konrad Knapp
Rok vydání: 2003
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.485417
Popis: F2 lens designs considering Intrinsic birefringence imposed more severe challenges to CaF2 manufacturing technology. In order to compensate the intrinsic birefringence other crystal orientations (100) / (110) are necessary. These other crystal orientation beside (111) require individual process optimization. In this paper the achieved improvements for CaF2 lens blank material will be presented. Furthermore the conversion of stress birefringence results from 633nm to 193nm or 157nm is unclear until now. At wavelength birefringence measurement results of different orientated lens blanks will be shown and discussed.
Databáze: OpenAIRE