Pyroelectric properties and X-ray photoelectron spectroscopic study of R.F. magnetron-sputtering-derived PZT thin films deposited on various interlayers
| Autor: | Chul-Ho Park, Mi-Sook Won, Won-Hyo Cha, Young-Gook Son, Chul-Su Lee |
|---|---|
| Rok vydání: | 2006 |
| Předmět: |
Materials science
Analytical chemistry Mineralogy Dielectric Substrate (electronics) Sputter deposition Condensed Matter Physics Zirconate Electronic Optical and Magnetic Materials Pyroelectricity X-ray photoelectron spectroscopy Mechanics of Materials Cavity magnetron Materials Chemistry Ceramics and Composites Electrical and Electronic Engineering Thin film |
| Zdroj: | Journal of Electroceramics. 17:619-623 |
| ISSN: | 1573-8663 1385-3449 |
| DOI: | 10.1007/s10832-006-8572-6 |
| Popis: | PZT thin films and interlayers were fabricated by the radio frequency (r.f.) Magnetron-sputtering from the Pb 1.1 Zr 0.53 Ti 0.47 O 3 , PbO and TiO 2 target. As a result of the XPS depth profile analysis, we can confirm that the substrate temperature affects the oxidation condition of each element of interlayers and the PZT film. Compared to the PZT/Pt structure, the dielectric and pyroelectric properties of PZT thin films inserted by interlayers were measured to a relatively high value. In particular, the PZT/PbO structure had the highest pyroelectric properties (P = 189.4 μC/cm 2 K; F D = 12.7×10 -6 Pa- 1/2 ; Fv = 0.018 m 2 /C). |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full text from SpringerLink