| Autor: |
Abhijeet Kshirsagar, Walied A. Moussa, Alexander Sampaleanu, Ryan Chee, Roger J. Zemp |
| Rok vydání: |
2013 |
| Předmět: |
|
| Zdroj: |
2013 IEEE International Ultrasonics Symposium (IUS). |
| Popis: |
Traditionally dielectric charging has been viewed as an undesirable feature of Capacitive Micromachined Ultrasound Transducers (CMUTs) because charging can alter performance of devices and lead to permanent collapse. We introduce a beneficial aspect of dielectric charging in CMUTs. We demonstrate CMUTs that may be pre-charged with a shift in collapse voltage so that at zero applied bias voltage they experience an electrostatic deflection due to trapped dielectric charge. We demonstrate efficient pre-collapse operation at zero applied bias voltage with exceptional long-term reliability. Similar existing strategies for pre-charging CMUTs were not implemented for diagnostic frequencies for immersion or tissue-coupled applications. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
