Large-area high-quality YBCO thin films by inverted cylindrical magnetron technique
| Autor: | L.M. Mercandalli, Yves Lemaitre, J.C. Mage, B. Dessertenne, Daniel Mansart, Bruno Marcilhac |
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| Rok vydání: | 1994 |
| Předmět: |
Microwave surface resistance
Materials science business.industry Energy Engineering and Power Technology Substrate (electronics) Condensed Matter Physics Electronic Optical and Magnetic Materials Quality (physics) Cavity magnetron Optoelectronics Cathode sputtering Electrical and Electronic Engineering Thin film business Sheet resistance |
| Zdroj: | Physica C: Superconductivity. :643-644 |
| ISSN: | 0921-4534 |
| DOI: | 10.1016/0921-4534(94)91545-8 |
| Popis: | We have deposited Y 1 Ba 2 Cu 3 O x (YBCO) films with low microwave surface resistance (Rs) on (100) LaAlO3 substrates by D.C. hollow cathode sputtering technique. Critical temperature (Tc) value of 93.5K and surface resistance (Rs) value of 330 μΩ at 77K and 10 GHz were measured on 15 x 15 mm 2 YBCO films. After to have overcome substrate unsticking problems, first results on 5cm diameter YBCO films showed Rs values less than 1 mΩ at 77K and 10 GHz. |
| Databáze: | OpenAIRE |
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