Analysis and Comparison of CD-SEM Edge Operators: A Contribution to Feature Width Metrology

Autor:	C.G. Frase, H. Bosse, Kai Hahm, Egbert Buhr, W. Häßler‐Grohne
Rok vydání:	2006
Předmět:	Engineering drawing Feature (computer vision) Instrumentation (computer programming) Edge (geometry) Mathematics Metrology
Zdroj:	Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro-and Nanometer Range
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f0152a3e9b7bea7c2118b901c3960fac https://doi.org/10.1002/3527606661.ch29 Zobrazit plný text záznamu