APPLICATION-SPECIFIC PACKAGING FOR CUSTOM MICROMECHANICAL STRUCTURES

Autor:	H. V. Allen, J. W. Knutti, S. C. Terry, John Hallock Jerman
Rok vydání:	1986
Předmět:	Silicon business.industry Computer science Electronic packaging chemistry.chemical_element Nanotechnology Integrated circuit law.invention chemistry law Cost analysis Application specific Microelectronics business
Zdroj:	1986 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
DOI:	10.31438/trf.hh1986.20
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::effaf9c90d831c2745eaabeee6358de3 https://doi.org/10.31438/trf.hh1986.20 Zobrazit plný text záznamu