Progress and perspectives in dry processes for emerging multidisciplinary applications: how can we improve our use of dry processes?

Autor:	Moritaka Nakamura, Kazunori Koga, Kazunori Shinoda, Shota Nunomura, Yoshito Kamaji, Yasushi Sonoda, Kazuo Takahashi, Kenichi Yoshikawa, Tomohiro Nozaki, Song-Yun Kang, Kenji Ishikawa, Daisuke Ogawa, Takayoshi Tsutsumi, Nobuyuki Kuboi, Tatsuo Ishijima, Tetsuji Shimizu, Taku Iwase, Haruka Suzuki, Mitsuhiro Omura, Nobuyuki Negishi
Rok vydání:	2019
Předmět:	Process management Physics and Astronomy (miscellaneous) Multidisciplinary approach General Engineering General Physics and Astronomy
Zdroj:	Japanese Journal of Applied Physics. 58:SE0803
ISSN:	1347-4065 0021-4922
DOI:	10.7567/1347-4065/ab163a
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::efbf09f1ecb1c0c21b5c261c1b3664c4 https://doi.org/10.7567/1347-4065/ab163a Zobrazit plný text záznamu