| Autor: |
Pierre Bleuet, Lucile Arnaud, Xavier Biquard, Peter Cloetens, Lise Doyen, Patrice Gergaud, Patrick Lamontagne, Maylis Lavayssière, Jean-Sébastien Micha, Olivier Renault, François Rieutord, Jean Susini, Olivier Ulrich, Erik M. Secula, David G. Seiler, Rajinder P. Khosla, Dan Herr, C. Michael Garner, Robert McDonald, Alain C. Diebold |
| Rok vydání: |
2009 |
| Předmět: |
|
| Zdroj: |
AIP Conference Proceedings. |
| Popis: |
The advent of 3rd generation synchrotron sources coupled with high efficiency x‐ray focusing optics opened new nanocharacterization possibilities. This paper is an overview of synchrotron‐based techniques that may be of interest for nanotechnology researchers. Although not exhaustive, it includes a general background of synchrotron principle and main x‐ray interactions before addressing nanoimaging possibilities. Three‐dimensional (3D) hard x‐ray multimodal tomography is now doable that allows producing 3D morphological, chemical and crystalline images with a sub‐100 nm resolution. Although the resolution is still limited with respect to electron imaging, it presents attractive features like depth resolution and non‐destructive exam. Besides imaging, diffraction also allows strain determination within microstructures and is illustrated here on 100 nm copper lines. Surface analysis is illustrated through X‐ray Photoelectron Emission Microscopy (XPEEM). |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
