Effect of excess-PB and prenucleation layer on properties of Pb(ZryTi1-y)O3 thin films prepared by mod process
| Autor: | I-Nan Lin, Hsiu-Fung Cheng, Cheng-Hsiung Lin, Han-Fang Teng |
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| Rok vydání: | 2000 |
| Předmět: |
Materials science
Chemical process of decomposition Analytical chemistry Coercivity Condensed Matter Physics Ferroelectricity Electronic Optical and Magnetic Materials Control and Systems Engineering Mod Materials Chemistry Ceramics and Composites Electrical and Electronic Engineering Thin film Polarization (electrochemistry) Layer (electronics) Stoichiometry |
| Zdroj: | Integrated Ferroelectrics. 30:203-212 |
| ISSN: | 1607-8489 1058-4587 |
| Popis: | A modified metal-organic decomposition process, MOD has been successfully utilized to improve the ferroelectric properties of Pb(Zr0.52Ti0.48)O3, PZT, thin films. Multilayer PZT/Pt(Si) films, which contain 0.12 μm layer of spin coated PbO-excess (10 mol%) precursors on top of 0.12 μm layer of stoichiometric PZT precursors, exhibit superior ferroelectric properties (Pr=14.2 μC/cm2; Ec=62 kV/cm) to the single layer PZT/Pt(Si) films of the same thickness (0.24 μm), which are either stoichiometric or 10 mol% Pb-enriched. The ferroelectric properties are further improved when the PZT films were synthesized using a thin pulsed laser deposited (PLD) prenucleation layer (0.06 μm). The subsequently MOD-prepared PZT films posses high remanent polarization (Pr=23.2–26.6 μC/cm2) and low coercive field (Ec=62.9–69.0 kV/cm). |
| Databáze: | OpenAIRE |
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