Flash Lamp Annealing of ITO thin films on ultra-thin glass

Autor:	Manuela Junghähnel, Stephanie Weller
Rok vydání:	2015
Předmět:	Flash-lamp Condensed Matter::Materials Science Thin glass Materials science Annealing (metallurgy) business.industry Transmittance Optoelectronics Thin film Conductivity Condensed Matter Physics business Surfaces Coatings and Films
Zdroj:	Vakuum in Forschung und Praxis. 27:29-33
ISSN:	0947-076X
DOI:	10.1002/vipr.201500586
Popis:	Ultra-fast thermal annealing of thin films with annealing times of few milliseconds are faster und more energy efficient than conventional furnace annealing methods. By using flash lamp annealing, only the surface is heated while the substrate remains cold. This allows the refinement of indium-tin-oxide films on rigid and ultra-thin flexible glass and improves their conductivity and transmittance.
Databáze:	OpenAIRE
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