High sensitive micro thermal conductivity detector with sandwich structure
| Autor: | Tian Bowen, Zhengyin Yu, Fei Feng, Lei Hou, Haimei Zhou, Xiaohong Ge, Xinxin Li |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
Silicon business.industry Thermal conductivity detector 010401 analytical chemistry Thermistor Detector Analytical chemistry chemistry.chemical_element Silicon on insulator 02 engineering and technology Substrate (electronics) 021001 nanoscience & nanotechnology High sensitive 01 natural sciences 0104 chemical sciences chemistry Deep reactive-ion etching Optoelectronics 0210 nano-technology business |
| Zdroj: | 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). |
| DOI: | 10.1109/transducers.2017.7994328 |
| Popis: | This paper reports a high sensitive micro thermal conductivity detector (μTCD) with sandwich structure, which is composed of glass substrate, silicon-on-insulator (SOI) with micro channels and glass with micro channels. A suspended cross-mesh structure includes a Pt thermistor protected by two SiNx layers and a cross-mesh support made of top silicon of SOI, and it is released by deep reactive ion etching (DRIE) substrate silicon of SOI. Our new μTCD has the better reliability, smaller excess dead volume and less process time compared to the state of the art. Experimental results show that this detector demonstrates a high sensitivity without pre-concentrator. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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