A new high-precision device for one-dimensional grating period measurement

Autor:	YuDa Chen, Changhe Zhou, YiHan Wang, XingXue Li, Wei Jia, Jin Wang
Rok vydání:	2022
Zdroj:	Holography, Diffractive Optics, and Applications XII.
DOI:	10.1117/12.2642155
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ef148bcdcca829b3de9d63fa166be6a8 https://doi.org/10.1117/12.2642155 Zobrazit plný text záznamu