MEMS-BASED SCANNING CALORIMETER FOR THERMODYNAMIC PROPERTIES OF NANOSTRUCTURES
| Autor: | L. H. Allen S. L. Lai |
|---|---|
| Rok vydání: | 1998 |
| Předmět: |
Materials science
Physics and Astronomy (miscellaneous) business.industry Mechanical Engineering Materials Science (miscellaneous) Enthalpy of fusion Evaporation Thermodynamics Calorimetry Condensed Matter Physics Atomic and Molecular Physics and Optics Calorimeter Differential scanning calorimetry Mechanics of Materials Melting point General Materials Science Thin film business Thermal energy |
| Zdroj: | Microscale Thermophysical Engineering. 2:11-19 |
| ISSN: | 1091-7640 1089-3954 |
| DOI: | 10.1080/108939598200060 |
| Popis: | Thermodynamic properties of small structures, such as the melting points and the process of mass transport, can be considerably different compared to material in the bulk form. Calorimetry is the standard experimental technique used to measure thermodynamics properties. However, this technique is extremely difficult to use for the study of small structures because the amount of energy exchanged during the measurement is extremely small - proportional to the amount of material. In order to measure small amounts of thermal energy we have scaled down the physical size of the calorimeter using MEMS technology. This thin-film differential scanning calorimeter has extremely high sensitivity, 0.01 mJ cm2, and is capable of measuring the melting phenomenon of 1 A of Sn deposited onto a SiN surface. In this article we investigate the size dependence of both the melting point and the heat of fusion for ultrathin films of Sn nanonstructures using multiple evaporation and thermal annealing cycles. |
| Databáze: | OpenAIRE |
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