AFM studies of polycrystalline calcium sulfide thin films grown by atomic layer deposition
| Autor: | S. Dey, Sun Jin Yun |
|---|---|
| Rok vydání: | 1999 |
| Předmět: |
Morphology (linguistics)
Chemistry Calcium sulfide Atomic force microscopy General Physics and Astronomy Surfaces and Interfaces General Chemistry Surface finish Condensed Matter Physics Surfaces Coatings and Films chemistry.chemical_compound Crystallography Atomic layer deposition Chemical engineering Crystallite Growth rate Thin film |
| Zdroj: | Applied Surface Science. 143:191-200 |
| ISSN: | 0169-4332 |
| Popis: | Polycrystalline CaS thin films were grown on Al 2 O 3 films deposited on Si-wafer using the atomic layer deposition (ALD) technique. The surface structure of these films was studied by AFM and compared with respective SEM images. The polycrystalline film surfaces comprise regular shaped crystallites. First report of a possible growth mechanism is presented, on studying the variation of morphological features (i.e., roughness and size of crystallites) with thickness and growth rate. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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