Orthogonal array pillar process development for high density 4F2 memory cells at 40nm pitch and beyond
| Autor: | Murat Pak, Wesley Zanders, Patrick Wong, Sandip Halder, Romuald Blanc, Laurent Souriau, Jeonghoon Lee, Gouri Sankar Kar |
|---|---|
| Rok vydání: | 2022 |
| Zdroj: | Optical and EUV Nanolithography XXXV. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|