| Autor: |
TM Donovan, EJ Ashley, R. Z. Dalbey, JB Franck, R. W. Woolever, L. F. Johnson |
| Rok vydání: |
2008 |
| Předmět: |
|
| DOI: |
10.1520/stp23137s |
| Popis: |
Scanning electron microscopy (SEM) was used to identify four distinct laser damage mor-phologies in ZnSe/ThF4 multilayer mirrors. There were three types of defect-initiated damage morphologies. Oblong-shaped damage sites oriented perpendicular to the electric field vector of the laser were associated with particulates on or near the surface of the ZnSe/ThF4 multilayers. Circular-shaped damage sites were initiated by particulates embed-ded beneath the top ZnSe layer. Selective laser damage at pinholes was identified as the third defectinitiated damage morphology. In addition to defect-initiated damage, stress-related damage was indicated by cracks near or within laser damage craters and erosion sites. Selective laser damage at nodular growth defects in SiH/Si02 multilayers was also observed using SEM. Samples with different numbers of nodules were prepared in-house using RF-diode, reactive sputtering. The low-defect mirror had the highest laser damage onset, and the mirror with the highest number of nodules had the lowest laser damage onset.© (1985) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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