Sliced linear zone plates for hard X-ray radiation

Autor:	B. A. Savitskii, N. V. Kalinin, I. A. Kopylets, R. M. Feshchenko, I. A. Artyukov, V. A. Burtsev, Aleksandr V Vinogradov, V. E. Pukha, V. V. Kondratenko, A. Yu. Devizenko
Rok vydání:	2012
Předmět:	Diffraction Materials science Physics and Astronomy (miscellaneous) Silicon business.industry X-ray chemistry.chemical_element Radiation engineering.material Zone plate Diffraction efficiency law.invention Optics Coating chemistry law Etching (microfabrication) engineering business
Zdroj:	Technical Physics. 57:1283-1288
ISSN:	1090-6525 1063-7842
Popis:	Linear zone plates for hard (E > 10 keV) X rays are considered. The technology of the plates includes cutting magnetron-sputtered W5Si3/Si multilayer coatings. The results of numerical computation suggest that this pair of materials provides a high efficiency in the first and second diffraction orders. It is found experimentally that good multilayer structures consisting of several hundreds of layers can be synthesized on silicon and glass substrates. It is shown that they can be cut by ion etching the multilayer coating through a mask.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ee75075ec4c771631f77968149126062 https://doi.org/10.1134/s1063784212090034 Zobrazit plný text záznamu Plný text ve formátu PDF