Thickness and Surface Profile Measurement by a Sinusoidal Wavelength-Scanning Interferometer

Autor:	Takamasa Suzuki, Hisashi Akiyama, Osami Sasaki
Rok vydání:	2005
Předmět:	Amplitude modulation Wavelength Interferometry Optics Amplitude Materials science business.industry Phase (waves) business Interference (wave propagation) Signal Phase modulation Atomic and Molecular Physics and Optics
Zdroj:	Optical Review. 12:319-323
ISSN:	1349-9432 1340-6000
Popis:	We propose a sinusoidal wavelength-scanning interferometer for measuring thickness and surface profile of a thin film. The interference signal contains phase modulation amplitude Z and phase $aL which are related to the positions and profiles of the reflecting surfaces, respectively. By reducing the difference between the detected signal and the estimated signal using the multidimensional nonlinear least-squares algorithm, we estimate values of Z and $aL. Experimental results show that the front and rear surfaces of a silica glass plate of 20 $mUm-thickness could be measured with an error less than 10 nm.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ee7296ce5d311188a39aed7c3c38e0db https://doi.org/10.1007/s10043-005-0319-0 Zobrazit plný text záznamu Full text from SpringerLink