Thickness and Surface Profile Measurement by a Sinusoidal Wavelength-Scanning Interferometer
Autor: | Takamasa Suzuki, Hisashi Akiyama, Osami Sasaki |
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Rok vydání: | 2005 |
Předmět: | |
Zdroj: | Optical Review. 12:319-323 |
ISSN: | 1349-9432 1340-6000 |
Popis: | We propose a sinusoidal wavelength-scanning interferometer for measuring thickness and surface profile of a thin film. The interference signal contains phase modulation amplitude Z and phase $aL which are related to the positions and profiles of the reflecting surfaces, respectively. By reducing the difference between the detected signal and the estimated signal using the multidimensional nonlinear least-squares algorithm, we estimate values of Z and $aL. Experimental results show that the front and rear surfaces of a silica glass plate of 20 $mUm-thickness could be measured with an error less than 10 nm. |
Databáze: | OpenAIRE |
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