Influence of buffer layer on nitrogen doped AZO relative humidity sensor with p-n heterojunction structure

Autor:	Chih Chin Yang, Cong Min Hu
Rok vydání:	2023
Předmět:	Mechanics of Materials Mechanical Engineering General Materials Science Condensed Matter Physics
Zdroj:	Materials Science in Semiconductor Processing. 164:107567
ISSN:	1369-8001
DOI:	10.1016/j.mssp.2023.107567
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ee69e9bbf36f44ce04b59217aff17af9 https://doi.org/10.1016/j.mssp.2023.107567 Zobrazit plný text záznamu Full Text from ScienceDirect