Correlation between Plasma OES and Properties of B-doped Diamond Films Grown by MW PE CVD

Autor:	A. T. Rakhimov, A. F. Pal, P. V. Minakov, Vasiliy Sen, Nikolay V. Suetin, V. A. Krivchenko, Maxim Belousov
Rok vydání:	2009
Předmět:	Materials science Absorption spectroscopy Analytical chemistry Diamond Plasma engineering.material Spectral line symbols.namesake Carbon film Boron doping engineering symbols Optical emission spectroscopy Raman spectroscopy
Zdroj:	ECS Transactions. 25:257-263
ISSN:	1938-6737 1938-5862
DOI:	10.1149/1.3207599
Popis:	Boron doped polycrystalline diamond films were grown using MW PE CVD method. Optical emission spectra (OES) of MW-plasma in the region from 200 nm to 800 nm during boron doped polycrystalline diamond films growth were in situ investigated. Raman spectroscopy method was used for morphology investigation of grown polycrystalline diamond films. Also, absorption spectroscopy method was used for optical properties investigation of all grown films.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ee464fb693df5b31f5fd176f96575db6 https://doi.org/10.1149/1.3207599 Zobrazit plný text záznamu