High power-durable RF-band SAW filters using single-crystal Al/Ti electrodes grown on 64°Y-X LiNbO3 substrates

Autor:	Noritoshi Kimura, Masahiro Nakano, Katsuo Sato
Rok vydání:	1998
Předmět:	Materials science business.industry Alloy Electrode engineering Electronic engineering Optoelectronics Electrical and Electronic Engineering engineering.material Vapour deposition business Single crystal Power (physics)
Zdroj:	Electronics Letters. 34:131
ISSN:	0013-5194
DOI:	10.1049/el:19980105
Popis:	To improve the power-durability of RF-band SAW filters, single-crystal Al/Ti electrode films were successfully grown on 64°Y-X LiNbO3 substrates by the electron-beam vapour deposition technique. The time to failure of the single-crystal Al/Ti electrodes became approximately 680 times longer than that of Al-Cu alloy electrodes.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ee3bff68363a8a33e13fc3c023c99bdf https://doi.org/10.1049/el:19980105 Zobrazit plný text záznamu