Ultra-Thin-Encapsulation Layers Fabrication for High-Resolution OLEDs Realized by a Showerhead-Type Initiated CVD and Plasma Enhanced Atomic Layer Deposition Hybrid System
| Autor: | Byeong Gyu Roh, Hun Hoe Heo, Seung Chul Park, Ji Ho Baek, Sung Gap Im, Ji Hye Kim, Seong Jun Jeong, Hyung Sang Park |
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| Rok vydání: | 2022 |
| Předmět: | |
| Zdroj: | Proceedings of the International Display Workshops. :438 |
| ISSN: | 1883-2490 |
| DOI: | 10.36463/idw.2022.0438 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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