| Autor: |
Alexey Kuzovkov, Pavel Tryasoguzov, Georgiy Teplov |
| Rok vydání: |
2020 |
| Předmět: |
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| Zdroj: |
International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis. |
| Popis: |
In this paper the effectiveness of machine learning methods for solving OPC problems was consider. The task was to determine the direction of displacement and the amount of displacement of the boundary of the segment of the topological drawing. The generated training database was used to train regression, random forest, gradient boosting, and feedforward convolutional neural network models. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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