Microwave plasma fluidized bed arc-PVD coating of particulate materials
| Autor: | Hannes Wolf, Monika Willert-Porada, Thorsten Gerdes, Zeljko Pajkic |
|---|---|
| Rok vydání: | 2008 |
| Předmět: |
Materials science
Mineralogy Surfaces and Interfaces General Chemistry Substrate (electronics) Chemical vapor deposition engineering.material Condensed Matter Physics Surfaces Coatings and Films Plasma arc welding Coating Chemical engineering Fluidized bed Physical vapor deposition visual_art Materials Chemistry engineering visual_art.visual_art_medium Ceramic Nitriding |
| Zdroj: | Surface and Coatings Technology. 202:3927-3932 |
| ISSN: | 0257-8972 |
| Popis: | A novel process for deposition of thin AlN and Al coatings on particulate carbon materials by means of an atmospheric pressure microwave plasma fluidized bed treatment is reported. The substrate powder and a fine aluminum powder are mixed and fluidized together in microwave plasma. Argon plasma yields a homogenous coating composed of pure aluminum on the substrate powder, whereas upon treatment in a reactive nitrogen plasma the deposited aluminum particles are nitrided and the resulting coating is an AlN ceramic. Coatings were characterized by means of SEM/FEM, EDX, XRD and TGA. Crystal structure of the deposited AlN was refined by Rietveld method. |
| Databáze: | OpenAIRE |
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