Thickness Dependence Study of Electron Beam Evaporated LBMO Manganite Thin Films for Bolometer Applications
Autor: | P. Sreedhara Reddy, Ch. Seshendra Reddy, A. Sivasankar Reddy |
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Rok vydání: | 2014 |
Předmět: |
Materials science
business.industry Condensed Matter Physics Manganite Electron beam physical vapor deposition Grain size Electronic Optical and Magnetic Materials Crystal Optics Electrical resistivity and conductivity Materials Chemistry Surface roughness Electrical and Electronic Engineering Thin film Composite material business Temperature coefficient |
Zdroj: | Journal of Electronic Materials. 43:1436-1442 |
ISSN: | 1543-186X 0361-5235 |
Popis: | La0.7Ba0.3MnO3 (LBMO) thin films with different thicknesses were deposited on Si substrates using an electron beam evaporation technique for bolometer applications. To evaluate the influence of the thickness on their structural, compositional, morphological, and electrical properties, the LBMO thin films were characterized by x-ray diffraction (XRD), energy-dispersive spectroscopy, atomic force microscopy, and a four-probe method. XRD measurements showed that the crystal quality of the LBMO films improved with increasing thickness. The surface morphology revealed that the grain size and surface roughness of the films increased with increasing thickness. The resistivity increased with increasing thickness of the film. The temperature coefficient of resistance of the LBMO films decreased from 5.15%/K to 4.12%/K with increase of the film thickness from 20 nm to 100 nm. |
Databáze: | OpenAIRE |
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