Bimetallic grayscale photomasks written using optical density feedback control

Autor:	Glenn H. Chapman, Reza Qarehbaghi, James M. Dykes
Rok vydání:	2011
Předmět:	Materials science Pixel business.industry Ranging Laser Grayscale Photodiode law.invention Optics law Approximation error Laser power scaling Photomask business
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
Popis:	When bimetallic thin films of Bi/In and Sn/In are laser exposed, they oxidize and become variably transparent. By controlling the writing laser power, binary and grayscale photomasks can be produced with the mask's transparency (optical density, OD), ranging between ~3.0 (unexposed) to
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::edbf8decdbfd19b0b634953beb3295f9 https://doi.org/10.1117/12.876234 Zobrazit plný text záznamu