Bimetallic grayscale photomasks written using optical density feedback control
Autor: | Glenn H. Chapman, Reza Qarehbaghi, James M. Dykes |
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Rok vydání: | 2011 |
Předmět: | |
Zdroj: | SPIE Proceedings. |
ISSN: | 0277-786X |
Popis: | When bimetallic thin films of Bi/In and Sn/In are laser exposed, they oxidize and become variably transparent. By controlling the writing laser power, binary and grayscale photomasks can be produced with the mask's transparency (optical density, OD), ranging between ~3.0 (unexposed) to |
Databáze: | OpenAIRE |
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