Autor:	Masamitsu Itoh, Toshiharu Nishimura, Naoya Hayashi, Kotaro Ooishi, Mika Nakao, Hideaki Sakurai, Yukihiko Esaki, Kazuo Sakamoto, Hiroyuki Miyashita
Rok vydání:	2002
Předmět:	Suction (medicine) Engineering Fabrication Resist business.industry Nozzle Forensic engineering Mechanical engineering business
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.467297
Popis:	The loading effect is becoming a great issue in mask fabrication. To reduce CD error due to resist load, we have developed a developer based on a new concept, Proximity Gap Suction Development (PGSD), involving the use of a nozzle to spout developer and suck in dirty developer. In this paper, the performance of PGSD is reported.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::edbdeeb8ef35d9e2bbea72e9ef49bcd6 https://doi.org/10.1117/12.467297 Zobrazit plný text záznamu