Air damping of high performance resonating micro-mirrors with angular vertical comb-drive actuators
| Autor: | Russell Farrugia, Ivan Grech, Duncan Camilleri, Owen Casha, Joseph Micallef, Barnaby Portelli, Edward Gatt |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science Acoustics Flow (psychology) 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Electronic Optical and Magnetic Materials Physics::Fluid Dynamics Amplitude Hardware and Architecture Parasitic drag Comb drive 0103 physical sciences Fluid dynamics Transient (oscillation) Electrical and Electronic Engineering 0210 nano-technology Actuator Cavity wall |
| Zdroj: | Microsystem Technologies. 28:1451-1465 |
| ISSN: | 1432-1858 0946-7076 |
| Popis: | The maximum scan angle amplitude of resonating micro-mirrors, intended for micro-projection display applications is limited by air damping. Three-dimensional transient Navier–Stokes (N–S) simulations are performed to analyse the fluid flow interactions with a high frequency scanning micro-mirror driven by angular vertical comb (AVC) actuators. The time-dependent damping moment contributions due to viscous shear and pressure drag are subsequently computed for both the mirror plate and comb-drive structures. A computational-efficient N–S model of the AVC structure, based on the sliding mesh technique available in ANSYS Fluent, is proposed. The effect of scan angle amplitude on the damping moment and the flow regime surrounding the oscillating micro-mirror plate is analysed in detail. It is shown that the simplified damping models applicable to resonant MEMS devices are not valid within the operating range of high performance micro-scanners. From dynamic mesh N–S simulations, the effect of the underlying mirror cavity wall on pressure drag damping is also evaluated. Good qualitative agreement in the overall quality factor is achieved between simulation and measurement results. |
| Databáze: | OpenAIRE |
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