Applications of model-based transparent surface films analysis using coherence scanning interferometry
| Autor: | Martin F. Fay, Thomas Dresel |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Materials science
business.industry Field of view 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Metrology 010309 optics Interferometry Optics Surface metrology Distortion 0103 physical sciences Coherence scanning interferometry Calibration 0210 nano-technology business Refractive index |
| Zdroj: | SPIE Proceedings. |
| ISSN: | 0277-786X |
| DOI: | 10.1117/12.2238997 |
| Popis: | Surface metrology must increasingly contend with sub-micron films, whose prevalence now extends to products well beyond semiconductor devices. For optical technologies such as coherence-scanning interferometry (CSI), transparent sub-micron films pose a dual challenge: film effects can distort the measured top surface topography map, and metrology requirements may now include 3D maps of film thickness. Yet CSI’s sensitivity also presents an opportunity: modeling film effects can decode surface and thickness from the distorted signal. Early model-based approaches entailed practical trade-offs between throughput and field of view, and restricted the choice of objective magnification. However, more recent advances allow full-field surface films analysis using any objective, with sample-agnostic calibration and throughput comparable to film-free measurements. Beyond transparent films, model-based CSI provides correct topography for any combination of dissimilar materials with known visible-spectrum refractive indices. Results demonstrate single-nm self-consistency between topography and thickness maps. |
| Databáze: | OpenAIRE |
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