New material for the production of fine line interconnects in integrated circuit technology

Autor:	G. J. Berry, J. Thomson, J. A. Cairns
Rok vydání:	1995
Předmět:	Interconnection Materials science law Production (economics) General Materials Science Nanotechnology Integrated circuit Fine line Material properties law.invention
Zdroj:	Journal of Materials Science Letters. 14:844-846
ISSN:	1573-4811 0261-8028
DOI:	10.1007/bf00639302
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ed9688eb6b7c5a1e748d92bcfdf47f13 https://doi.org/10.1007/bf00639302 Zobrazit plný text záznamu Full text from SpringerLink