Identification and Excitation Mechanisms of the Lines and Bands of Boron-Containing Components in the Optical Emission Spectra of Low-Temperature BF3/Ar Plasmas

Autor:	V. P. Kudrya
Rok vydání:	2019
Předmět:	Range (particle radiation) Materials science Boron containing Materials Chemistry Analytical chemistry Optical emission spectroscopy Emission spectrum Plasma Electrical and Electronic Engineering Condensed Matter Physics Excitation Spectral line Electronic Optical and Magnetic Materials
Zdroj:	Russian Microelectronics. 48:37-42
ISSN:	1608-3415 1063-7397
DOI:	10.1134/s1063739719010050
Popis:	B and B+ emission lines and the identification of BF emission bands in the spectra of technological BF3/Ar plasmas are analyzed. The bands identified correspond to the electron-vibrational transitions b 3Σ+(ν'') → a3Π(ν'), ν'' = 0–2, and lie in the range 310–340 nm. In the spectra, no emission lines belonging to other boron-containing compounds are observed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ed8684b4a16e44992e26da3390d0c6ec https://doi.org/10.1134/s1063739719010050 Zobrazit plný text záznamu Full text from SpringerLink