Metal‐vapor production by sputtering in a hollow‐cathode discharge: Theory and experiment

Autor:	George Collins, B. E. Warner, K. B. Persson
Rok vydání:	1979
Předmět:	Physics::Instrumentation and Detectors Chemistry Analytical chemistry General Physics and Astronomy Laser Cathode law.invention Metal Physics::Plasma Physics law Sputtering Excited state Ionization visual_art visual_art.visual_art_medium Atomic physics Spatial dependence Excitation
Zdroj:	Journal of Applied Physics. 50:5694-5703
ISSN:	1089-7550 0021-8979
Popis:	Laser action in singly ionized metal atoms has been obtained when a rare gas is excited in a metal hollow cathode. The required metal‐vapor density is produced by discharge sputtering from the cathode and the excitation of upper levels occurs via a charge‐transfer reaction of the type B++M → (M+)+B+ΔE. We present a unified discharge‐sputtering theory which describes the metal density created in the hollow cathode, including both the current and spatial dependence. The predictions of this model are then compared to the measured dependence of metal‐vapor density with current, spatial position, and buffer‐gas pressure. Discharge conditions which support laser oscillation are emphasized. Agreement between theory and experiment is good.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ed7f64ca9301a478d00a4b7c1183f4d3 https://doi.org/10.1063/1.326758 Zobrazit plný text záznamu