| Autor: |
R.F. Peart, J.E. Mynard, C. Knowler, M.F. Yao, E. Pasztor, C. J. Richmond, P.L.F. Hemment, K.G. Stephens |
| Rok vydání: |
1985 |
| Předmět: |
|
| Zdroj: |
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 6:100-105 |
| ISSN: |
0168-583X |
| DOI: |
10.1016/0168-583x(85)90616-0 |
| Popis: |
The 400 keV research implanter at the University of Surrey has been designed, primarily, for the implantation of high doses of ions into samples of various size and geometry. This goal has been achieved by the use of the Freeman type source, a cylindrical homogeneous lens for post analysis acceleration and electrostatic beam scanning. In this paper we describe the machine report on its performance and give a description of the novel design of an electrostatic beam switch. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
